Matches in SemOpenAlex for { <https://semopenalex.org/work/W89274784> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W89274784 abstract "The design principles of a research complex for electron-beam lithography based on ZRM-12 apparatus and modern computer technology are examined. A system of hardware and software is developed that provides structures with various geometries and a programmable exposure-dose distribution. The complex is designed for study of the physical principles of the production of nonlinear shaped structures in the creation of complex elements of x-ray optics. The structure of the complex is described, schematic diagrams and timing charts for a special-purpose controller for an electron-optical system are provided, and experimental results are presented." @default.
- W89274784 created "2016-06-24" @default.
- W89274784 creator A5069002965 @default.
- W89274784 creator A5072730620 @default.
- W89274784 creator A5091851475 @default.
- W89274784 date "1987-10-01" @default.
- W89274784 modified "2023-09-23" @default.
- W89274784 title "Research complex for electron-beam lithography" @default.
- W89274784 hasPublicationYear "1987" @default.
- W89274784 type Work @default.
- W89274784 sameAs 89274784 @default.
- W89274784 citedByCount "0" @default.
- W89274784 crossrefType "journal-article" @default.
- W89274784 hasAuthorship W89274784A5069002965 @default.
- W89274784 hasAuthorship W89274784A5072730620 @default.
- W89274784 hasAuthorship W89274784A5091851475 @default.
- W89274784 hasConcept C120665830 @default.
- W89274784 hasConcept C121332964 @default.
- W89274784 hasConcept C127413603 @default.
- W89274784 hasConcept C147120987 @default.
- W89274784 hasConcept C171250308 @default.
- W89274784 hasConcept C185544564 @default.
- W89274784 hasConcept C192328126 @default.
- W89274784 hasConcept C192562407 @default.
- W89274784 hasConcept C199360897 @default.
- W89274784 hasConcept C200274948 @default.
- W89274784 hasConcept C203479927 @default.
- W89274784 hasConcept C204223013 @default.
- W89274784 hasConcept C24326235 @default.
- W89274784 hasConcept C2777904410 @default.
- W89274784 hasConcept C2779227376 @default.
- W89274784 hasConcept C41008148 @default.
- W89274784 hasConcept C53524968 @default.
- W89274784 hasConcept C6557445 @default.
- W89274784 hasConcept C86803240 @default.
- W89274784 hasConcept C95312477 @default.
- W89274784 hasConceptScore W89274784C120665830 @default.
- W89274784 hasConceptScore W89274784C121332964 @default.
- W89274784 hasConceptScore W89274784C127413603 @default.
- W89274784 hasConceptScore W89274784C147120987 @default.
- W89274784 hasConceptScore W89274784C171250308 @default.
- W89274784 hasConceptScore W89274784C185544564 @default.
- W89274784 hasConceptScore W89274784C192328126 @default.
- W89274784 hasConceptScore W89274784C192562407 @default.
- W89274784 hasConceptScore W89274784C199360897 @default.
- W89274784 hasConceptScore W89274784C200274948 @default.
- W89274784 hasConceptScore W89274784C203479927 @default.
- W89274784 hasConceptScore W89274784C204223013 @default.
- W89274784 hasConceptScore W89274784C24326235 @default.
- W89274784 hasConceptScore W89274784C2777904410 @default.
- W89274784 hasConceptScore W89274784C2779227376 @default.
- W89274784 hasConceptScore W89274784C41008148 @default.
- W89274784 hasConceptScore W89274784C53524968 @default.
- W89274784 hasConceptScore W89274784C6557445 @default.
- W89274784 hasConceptScore W89274784C86803240 @default.
- W89274784 hasConceptScore W89274784C95312477 @default.
- W89274784 hasLocation W892747841 @default.
- W89274784 hasOpenAccess W89274784 @default.
- W89274784 hasPrimaryLocation W892747841 @default.
- W89274784 hasRelatedWork W1578794260 @default.
- W89274784 hasRelatedWork W1825708291 @default.
- W89274784 hasRelatedWork W1974277603 @default.
- W89274784 hasRelatedWork W1989475524 @default.
- W89274784 hasRelatedWork W2004558487 @default.
- W89274784 hasRelatedWork W2007738270 @default.
- W89274784 hasRelatedWork W2018764392 @default.
- W89274784 hasRelatedWork W2041926904 @default.
- W89274784 hasRelatedWork W2052725496 @default.
- W89274784 hasRelatedWork W2065400051 @default.
- W89274784 hasRelatedWork W2083434813 @default.
- W89274784 hasRelatedWork W2102842650 @default.
- W89274784 hasRelatedWork W2110296111 @default.
- W89274784 hasRelatedWork W2116307665 @default.
- W89274784 hasRelatedWork W2139272746 @default.
- W89274784 hasRelatedWork W2153082104 @default.
- W89274784 hasRelatedWork W2167094002 @default.
- W89274784 hasRelatedWork W2113425778 @default.
- W89274784 hasRelatedWork W2475893140 @default.
- W89274784 hasRelatedWork W2524627222 @default.
- W89274784 isParatext "false" @default.
- W89274784 isRetracted "false" @default.
- W89274784 magId "89274784" @default.
- W89274784 workType "article" @default.