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- W896018802 abstract "Hafnium dioxide (<TEX>$HfO_2$</TEX>) thin film as a gate dielectric for organic thin film transistors is prepared by plasma enhanced atomic layer deposition (PEALD). Mostly crystalline of <TEX>$HfO_2$</TEX> film can be obtained with oxygen plasma and with water at relatively low temperature of <TEX>$200^{circ}C$</TEX>. <TEX>$HfO_2$</TEX> was deposited as a uniform rate of <TEX>$1.2;A^{circ}$</TEX>/cycle. The pentacene TFT was prepared by thermal evaporation method with hafnium dioxide as a gate dielectric. The electrical properties of the OTFT were characterized." @default.
- W896018802 created "2016-06-24" @default.
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- W896018802 date "2008-12-31" @default.
- W896018802 modified "2023-10-18" @default.
- W896018802 title "Low Temperature Preparation of Hafnium Oxide Thin Film for OTFT by Atomic Layer Deposition" @default.
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- W896018802 doi "https://doi.org/10.4313/teem.2008.9.6.247" @default.
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