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- W898551279 abstract "Due to the lack of important seismic mass, CMOS-FSBM cantilevers have never been carefully considered for intertial sensing. This paper demonstrates that such beams can be used for acceleration measurement. A dedicated cantilever has been designed and fabricated. experimental results have demonstrated a sensitivity of about 22.4 mV/g." @default.
- W898551279 created "2016-06-24" @default.
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- W898551279 date "2004-09-12" @default.
- W898551279 modified "2023-09-23" @default.
- W898551279 title "A CMOS MEMS Accelerometer with Bulk Micromachining" @default.
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- W898551279 hasPublicationYear "2004" @default.
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