Matches in SemOpenAlex for { <https://semopenalex.org/work/W901329120> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W901329120 endingPage "36" @default.
- W901329120 startingPage "30" @default.
- W901329120 abstract "ZnO thin-film sensors were fabricated by RF magnetron sputtering method. The composition of the device material was 4 wt. % , 1 wt. % and 0.2 wt. % on the basis of ZnO material for developing the high sensitive TMA gas sensor which have an appropriate resistivity and the stability for practical use. They were also grown on the substrates heated at under a pure oxygen pressure of about 10 mTorr with a power of about 80 watts for 10 minutes. So as to enhance the stability of the resistivity, the thin films were annealed from to . The sensors made with the thin film which were annealed at for 60 minutes in pure oxygen gas exhibited a good sensing properties for TMA gas. The thin film grown at this condition showed the maximum sensitivity of 550 in TMA gas concentration of 160 ppm, and exhibited a good stability and excellent linearity." @default.
- W901329120 created "2016-06-24" @default.
- W901329120 creator A5002095211 @default.
- W901329120 creator A5049875261 @default.
- W901329120 creator A5052665170 @default.
- W901329120 creator A5062853596 @default.
- W901329120 date "1996-01-01" @default.
- W901329120 modified "2023-09-24" @default.
- W901329120 title "Characteristics of TMA Gas Detection of a ZnO Thin Films by Annealing" @default.
- W901329120 hasPublicationYear "1996" @default.
- W901329120 type Work @default.
- W901329120 sameAs 901329120 @default.
- W901329120 citedByCount "0" @default.
- W901329120 crossrefType "journal-article" @default.
- W901329120 hasAuthorship W901329120A5002095211 @default.
- W901329120 hasAuthorship W901329120A5049875261 @default.
- W901329120 hasAuthorship W901329120A5052665170 @default.
- W901329120 hasAuthorship W901329120A5062853596 @default.
- W901329120 hasConcept C113196181 @default.
- W901329120 hasConcept C119599485 @default.
- W901329120 hasConcept C121332964 @default.
- W901329120 hasConcept C127413603 @default.
- W901329120 hasConcept C159985019 @default.
- W901329120 hasConcept C171250308 @default.
- W901329120 hasConcept C178790620 @default.
- W901329120 hasConcept C185592680 @default.
- W901329120 hasConcept C19067145 @default.
- W901329120 hasConcept C192562407 @default.
- W901329120 hasConcept C22423302 @default.
- W901329120 hasConcept C2777855556 @default.
- W901329120 hasConcept C30646810 @default.
- W901329120 hasConcept C43617362 @default.
- W901329120 hasConcept C49040817 @default.
- W901329120 hasConcept C540031477 @default.
- W901329120 hasConcept C61427134 @default.
- W901329120 hasConcept C69990965 @default.
- W901329120 hasConcept C97355855 @default.
- W901329120 hasConceptScore W901329120C113196181 @default.
- W901329120 hasConceptScore W901329120C119599485 @default.
- W901329120 hasConceptScore W901329120C121332964 @default.
- W901329120 hasConceptScore W901329120C127413603 @default.
- W901329120 hasConceptScore W901329120C159985019 @default.
- W901329120 hasConceptScore W901329120C171250308 @default.
- W901329120 hasConceptScore W901329120C178790620 @default.
- W901329120 hasConceptScore W901329120C185592680 @default.
- W901329120 hasConceptScore W901329120C19067145 @default.
- W901329120 hasConceptScore W901329120C192562407 @default.
- W901329120 hasConceptScore W901329120C22423302 @default.
- W901329120 hasConceptScore W901329120C2777855556 @default.
- W901329120 hasConceptScore W901329120C30646810 @default.
- W901329120 hasConceptScore W901329120C43617362 @default.
- W901329120 hasConceptScore W901329120C49040817 @default.
- W901329120 hasConceptScore W901329120C540031477 @default.
- W901329120 hasConceptScore W901329120C61427134 @default.
- W901329120 hasConceptScore W901329120C69990965 @default.
- W901329120 hasConceptScore W901329120C97355855 @default.
- W901329120 hasIssue "1" @default.
- W901329120 hasLocation W9013291201 @default.
- W901329120 hasOpenAccess W901329120 @default.
- W901329120 hasPrimaryLocation W9013291201 @default.
- W901329120 hasRelatedWork W1986624575 @default.
- W901329120 hasRelatedWork W1996244067 @default.
- W901329120 hasRelatedWork W2018096962 @default.
- W901329120 hasRelatedWork W2026667517 @default.
- W901329120 hasRelatedWork W2073677496 @default.
- W901329120 hasRelatedWork W2085267252 @default.
- W901329120 hasRelatedWork W2093013047 @default.
- W901329120 hasRelatedWork W2093153416 @default.
- W901329120 hasRelatedWork W2116642468 @default.
- W901329120 hasRelatedWork W2146750931 @default.
- W901329120 hasRelatedWork W2149080645 @default.
- W901329120 hasRelatedWork W2276947212 @default.
- W901329120 hasRelatedWork W2335477713 @default.
- W901329120 hasRelatedWork W2349193832 @default.
- W901329120 hasRelatedWork W2361312203 @default.
- W901329120 hasRelatedWork W23645192 @default.
- W901329120 hasRelatedWork W2599259584 @default.
- W901329120 hasRelatedWork W3206217679 @default.
- W901329120 hasRelatedWork W786573341 @default.
- W901329120 hasRelatedWork W2613176051 @default.
- W901329120 hasVolume "5" @default.
- W901329120 isParatext "false" @default.
- W901329120 isRetracted "false" @default.
- W901329120 magId "901329120" @default.
- W901329120 workType "article" @default.