Matches in SemOpenAlex for { <https://semopenalex.org/work/W90343721> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W90343721 abstract "This chapter reviews the basic properties, major chemical vapor deposition (CVD) reactions and processes, and the present and potential applications of the ceramic materials, particularly oxides. Oxides are the largest group of ceramic materials with remarkable chemical inertness, good high temperature properties, and resistance to oxidation. They have the characteristics of ionic crystals—optical transparency when pure, high electrical resistivity, low thermal conductivity, diamagnetism, and chemical stability. One of the important oxides is aluminum oxide. It is also known as alumina, which is a highly stable compound. It is readily obtained by CVD. Its CVD reactions include: the hydrolysis of aluminum trichloride for the deposition of alumina. This reaction, based on the water-gas reaction, takes place in excess hydrogen, at an optimum temperature of 1050°C and at a low pressure (ca. 1 Torr). Metallo-organic chemical vapor deposition (MOCVD) is also used to deposit alumina at lower temperatures. A common reaction is the pyrolysis of an aluminum alkoxide such as aluminum isopropoxide. Some of its applications include: coatings for carbide tools, sealant coatings for plasma-sprayed oxides, and thin films in the fabrication of transistors (FET) and other semiconductor applications." @default.
- W90343721 created "2016-06-24" @default.
- W90343721 creator A5049651221 @default.
- W90343721 date "1999-01-01" @default.
- W90343721 modified "2023-09-27" @default.
- W90343721 title "The CVD of Ceramic Materials" @default.
- W90343721 cites W1506823599 @default.
- W90343721 cites W1607784784 @default.
- W90343721 cites W1994442369 @default.
- W90343721 cites W1995093167 @default.
- W90343721 cites W2002904152 @default.
- W90343721 cites W2007044341 @default.
- W90343721 cites W2010966514 @default.
- W90343721 cites W2013237789 @default.
- W90343721 cites W2020450421 @default.
- W90343721 cites W2046550411 @default.
- W90343721 cites W2064734684 @default.
- W90343721 cites W2080387539 @default.
- W90343721 cites W2088138546 @default.
- W90343721 cites W2104600627 @default.
- W90343721 cites W2115399876 @default.
- W90343721 cites W2155053929 @default.
- W90343721 cites W2167810515 @default.
- W90343721 cites W2207272465 @default.
- W90343721 cites W283648427 @default.
- W90343721 cites W1564530058 @default.
- W90343721 cites W2461594048 @default.
- W90343721 doi "https://doi.org/10.1016/b978-081551432-9.50014-0" @default.
- W90343721 hasPublicationYear "1999" @default.
- W90343721 type Work @default.
- W90343721 sameAs 90343721 @default.
- W90343721 citedByCount "1" @default.
- W90343721 countsByYear W903437212021 @default.
- W90343721 crossrefType "book-chapter" @default.
- W90343721 hasAuthorship W90343721A5049651221 @default.
- W90343721 hasConcept C127413603 @default.
- W90343721 hasConcept C134132462 @default.
- W90343721 hasConcept C159985019 @default.
- W90343721 hasConcept C171250308 @default.
- W90343721 hasConcept C179104552 @default.
- W90343721 hasConcept C185592680 @default.
- W90343721 hasConcept C19067145 @default.
- W90343721 hasConcept C192562407 @default.
- W90343721 hasConcept C42360764 @default.
- W90343721 hasConcept C513153333 @default.
- W90343721 hasConcept C57410435 @default.
- W90343721 hasConceptScore W90343721C127413603 @default.
- W90343721 hasConceptScore W90343721C134132462 @default.
- W90343721 hasConceptScore W90343721C159985019 @default.
- W90343721 hasConceptScore W90343721C171250308 @default.
- W90343721 hasConceptScore W90343721C179104552 @default.
- W90343721 hasConceptScore W90343721C185592680 @default.
- W90343721 hasConceptScore W90343721C19067145 @default.
- W90343721 hasConceptScore W90343721C192562407 @default.
- W90343721 hasConceptScore W90343721C42360764 @default.
- W90343721 hasConceptScore W90343721C513153333 @default.
- W90343721 hasConceptScore W90343721C57410435 @default.
- W90343721 hasLocation W903437211 @default.
- W90343721 hasOpenAccess W90343721 @default.
- W90343721 hasPrimaryLocation W903437211 @default.
- W90343721 hasRelatedWork W120638925 @default.
- W90343721 hasRelatedWork W1849058248 @default.
- W90343721 hasRelatedWork W1996551465 @default.
- W90343721 hasRelatedWork W2040793882 @default.
- W90343721 hasRelatedWork W2064693665 @default.
- W90343721 hasRelatedWork W2093267219 @default.
- W90343721 hasRelatedWork W2098692631 @default.
- W90343721 hasRelatedWork W2113064923 @default.
- W90343721 hasRelatedWork W2137201317 @default.
- W90343721 hasRelatedWork W2157836052 @default.
- W90343721 hasRelatedWork W2332404389 @default.
- W90343721 hasRelatedWork W242716895 @default.
- W90343721 hasRelatedWork W2483170946 @default.
- W90343721 hasRelatedWork W3195666971 @default.
- W90343721 hasRelatedWork W3207903328 @default.
- W90343721 hasRelatedWork W64729286 @default.
- W90343721 hasRelatedWork W1510576511 @default.
- W90343721 hasRelatedWork W1529259419 @default.
- W90343721 hasRelatedWork W2266215974 @default.
- W90343721 hasRelatedWork W291494084 @default.
- W90343721 isParatext "false" @default.
- W90343721 isRetracted "false" @default.
- W90343721 magId "90343721" @default.
- W90343721 workType "book-chapter" @default.