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- W90460377 abstract "A front surface plasma etch with Freon 14+8% O/sub 2/ or sulfur hexafluoride (SF/sub 6/) was found to improve terrestrial solar cell output. SEM studies of these samples revealed surface pitting on Freon 14 etched samples. About 50% of the improvement from Freon etched samples can be attributed to the light capturing effects of surface pits. Output increases from SF/sub 6/ plasma etched cells were found to be comparable with Freon etched cells after subtraction of the light trapping effects. The excess output improvement might be attributed to reduced junction depth or removal of near surface lattice damage. Investigations attempting to identify the cause are described. 1 ref." @default.
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- W90460377 date "1980-01-01" @default.
- W90460377 modified "2023-09-22" @default.
- W90460377 title "Effects of plasma etching solar cell front surfaces" @default.
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