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- W91397913 abstract "This paper reviews nanofabrication techniques using focused ion beams(FIB). Nanofabrication is important for exploratory study of physics in mesoscopic systems and future applications. Ion beam techniques play an important role in nanofabrication, and various new ion beam systems and fabrication techniques have been developed. Among them, FIB techniques are promising in various nanofabrication steps including lithography, doping, pattern transfer and in situ fabrication. Nanopattern delineation and nanodevice fabrication have already been demonstrated using FIB." @default.
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- W91397913 title "Nanofabrication Using Focused Ion Beams" @default.
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- W91397913 doi "https://doi.org/10.1016/b978-0-444-81994-9.50114-7" @default.
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