Matches in SemOpenAlex for { <https://semopenalex.org/work/W92954098> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W92954098 abstract "The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established." @default.
- W92954098 created "2016-06-24" @default.
- W92954098 creator A5003146451 @default.
- W92954098 creator A5005439164 @default.
- W92954098 creator A5012180638 @default.
- W92954098 creator A5017968409 @default.
- W92954098 creator A5030879936 @default.
- W92954098 creator A5035981443 @default.
- W92954098 creator A5049949263 @default.
- W92954098 creator A5051454515 @default.
- W92954098 creator A5073536307 @default.
- W92954098 creator A5082502109 @default.
- W92954098 creator A5010193978 @default.
- W92954098 date "2000-01-01" @default.
- W92954098 modified "2023-09-27" @default.
- W92954098 title "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes" @default.
- W92954098 doi "https://doi.org/10.2172/750344" @default.
- W92954098 hasPublicationYear "2000" @default.
- W92954098 type Work @default.
- W92954098 sameAs 92954098 @default.
- W92954098 citedByCount "74" @default.
- W92954098 countsByYear W929540982012 @default.
- W92954098 countsByYear W929540982013 @default.
- W92954098 countsByYear W929540982014 @default.
- W92954098 countsByYear W929540982015 @default.
- W92954098 countsByYear W929540982016 @default.
- W92954098 countsByYear W929540982017 @default.
- W92954098 countsByYear W929540982020 @default.
- W92954098 countsByYear W929540982021 @default.
- W92954098 countsByYear W929540982022 @default.
- W92954098 countsByYear W929540982023 @default.
- W92954098 crossrefType "report" @default.
- W92954098 hasAuthorship W92954098A5003146451 @default.
- W92954098 hasAuthorship W92954098A5005439164 @default.
- W92954098 hasAuthorship W92954098A5010193978 @default.
- W92954098 hasAuthorship W92954098A5012180638 @default.
- W92954098 hasAuthorship W92954098A5017968409 @default.
- W92954098 hasAuthorship W92954098A5030879936 @default.
- W92954098 hasAuthorship W92954098A5035981443 @default.
- W92954098 hasAuthorship W92954098A5049949263 @default.
- W92954098 hasAuthorship W92954098A5051454515 @default.
- W92954098 hasAuthorship W92954098A5073536307 @default.
- W92954098 hasAuthorship W92954098A5082502109 @default.
- W92954098 hasBestOaLocation W929540981 @default.
- W92954098 hasConcept C121332964 @default.
- W92954098 hasConcept C126322002 @default.
- W92954098 hasConcept C127413603 @default.
- W92954098 hasConcept C163258240 @default.
- W92954098 hasConcept C171250308 @default.
- W92954098 hasConcept C192562407 @default.
- W92954098 hasConcept C200601418 @default.
- W92954098 hasConcept C2777673350 @default.
- W92954098 hasConcept C2781300812 @default.
- W92954098 hasConcept C37977207 @default.
- W92954098 hasConcept C41008148 @default.
- W92954098 hasConcept C43214815 @default.
- W92954098 hasConcept C62520636 @default.
- W92954098 hasConcept C71924100 @default.
- W92954098 hasConcept C78519656 @default.
- W92954098 hasConcept C84945661 @default.
- W92954098 hasConceptScore W92954098C121332964 @default.
- W92954098 hasConceptScore W92954098C126322002 @default.
- W92954098 hasConceptScore W92954098C127413603 @default.
- W92954098 hasConceptScore W92954098C163258240 @default.
- W92954098 hasConceptScore W92954098C171250308 @default.
- W92954098 hasConceptScore W92954098C192562407 @default.
- W92954098 hasConceptScore W92954098C200601418 @default.
- W92954098 hasConceptScore W92954098C2777673350 @default.
- W92954098 hasConceptScore W92954098C2781300812 @default.
- W92954098 hasConceptScore W92954098C37977207 @default.
- W92954098 hasConceptScore W92954098C41008148 @default.
- W92954098 hasConceptScore W92954098C43214815 @default.
- W92954098 hasConceptScore W92954098C62520636 @default.
- W92954098 hasConceptScore W92954098C71924100 @default.
- W92954098 hasConceptScore W92954098C78519656 @default.
- W92954098 hasConceptScore W92954098C84945661 @default.
- W92954098 hasLocation W929540981 @default.
- W92954098 hasLocation W929540982 @default.
- W92954098 hasLocation W929540983 @default.
- W92954098 hasOpenAccess W92954098 @default.
- W92954098 hasPrimaryLocation W929540981 @default.
- W92954098 hasRelatedWork W2091943280 @default.
- W92954098 hasRelatedWork W2108245761 @default.
- W92954098 hasRelatedWork W2210812206 @default.
- W92954098 hasRelatedWork W2293783396 @default.
- W92954098 hasRelatedWork W2355682521 @default.
- W92954098 hasRelatedWork W2361928877 @default.
- W92954098 hasRelatedWork W3205391912 @default.
- W92954098 hasRelatedWork W92954098 @default.
- W92954098 hasRelatedWork W980909119 @default.
- W92954098 hasRelatedWork W2135637858 @default.
- W92954098 isParatext "false" @default.
- W92954098 isRetracted "false" @default.
- W92954098 magId "92954098" @default.
- W92954098 workType "report" @default.