Matches in SemOpenAlex for { <https://semopenalex.org/work/W930831715> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W930831715 endingPage "263" @default.
- W930831715 startingPage "259" @default.
- W930831715 abstract "We propose the Ge CMOS photonics platform with Ge-on-Insulator (GOI) substrate on which Ge mid-infrared photonic devices and Ge CMOS transistors can be monolithically integrated. The GOI wafer for the Ge CMOS photonics was fabricated by combining wafer bonding and H ion cut technologies. We studied the effect of thermal annealing on the GOI substrate in terms of crystal quality, surface morphology and electrical property. From Raman spectrum, it was found that the crystal quality of the Ge layer was significantly recovered after a 550 °C annealing in N2 (or O2) ambient for 1 h. Meanwhile, the surface roughness of the GOI substrate remained very low even after the annealing process. As a result, the significant improvements on electrical properties of the GOI substrate were confirmed by Hall measurement results. The carrier density of a GOI Hall device decreases from 2.9×1016 to 8.9×1015 cm−3 and hole mobility increases from 925 to 2295 cm2/V s. These results strongly suggest the necessity of a proper thermal annealing on improving the GOI qualities." @default.
- W930831715 created "2016-06-24" @default.
- W930831715 creator A5003619700 @default.
- W930831715 creator A5025650947 @default.
- W930831715 creator A5042410367 @default.
- W930831715 creator A5085183762 @default.
- W930831715 date "2016-02-01" @default.
- W930831715 modified "2023-10-18" @default.
- W930831715 title "Impact of thermal annealing on Ge-on-Insulator substrate fabricated by wafer bonding" @default.
- W930831715 cites W1967532749 @default.
- W930831715 cites W1983461897 @default.
- W930831715 cites W1997645546 @default.
- W930831715 cites W2004589402 @default.
- W930831715 cites W2005013826 @default.
- W930831715 cites W2024815409 @default.
- W930831715 cites W2037795060 @default.
- W930831715 cites W2042458968 @default.
- W930831715 cites W2047553858 @default.
- W930831715 cites W2047881056 @default.
- W930831715 cites W2052517052 @default.
- W930831715 cites W2054191380 @default.
- W930831715 cites W2055218043 @default.
- W930831715 cites W2060075600 @default.
- W930831715 cites W2063197949 @default.
- W930831715 cites W2067601930 @default.
- W930831715 cites W2069579862 @default.
- W930831715 cites W2075310654 @default.
- W930831715 cites W2080572768 @default.
- W930831715 cites W2085599402 @default.
- W930831715 cites W2095904193 @default.
- W930831715 cites W2112368854 @default.
- W930831715 cites W2170161804 @default.
- W930831715 cites W2319143189 @default.
- W930831715 doi "https://doi.org/10.1016/j.mssp.2015.07.021" @default.
- W930831715 hasPublicationYear "2016" @default.
- W930831715 type Work @default.
- W930831715 sameAs 930831715 @default.
- W930831715 citedByCount "40" @default.
- W930831715 countsByYear W9308317152016 @default.
- W930831715 countsByYear W9308317152017 @default.
- W930831715 countsByYear W9308317152018 @default.
- W930831715 countsByYear W9308317152019 @default.
- W930831715 countsByYear W9308317152020 @default.
- W930831715 countsByYear W9308317152021 @default.
- W930831715 crossrefType "journal-article" @default.
- W930831715 hasAuthorship W930831715A5003619700 @default.
- W930831715 hasAuthorship W930831715A5025650947 @default.
- W930831715 hasAuthorship W930831715A5042410367 @default.
- W930831715 hasAuthorship W930831715A5085183762 @default.
- W930831715 hasConcept C107365816 @default.
- W930831715 hasConcept C111368507 @default.
- W930831715 hasConcept C120665830 @default.
- W930831715 hasConcept C121332964 @default.
- W930831715 hasConcept C127313418 @default.
- W930831715 hasConcept C159985019 @default.
- W930831715 hasConcept C160671074 @default.
- W930831715 hasConcept C192562407 @default.
- W930831715 hasConcept C2777289219 @default.
- W930831715 hasConcept C2777855556 @default.
- W930831715 hasConcept C2779133538 @default.
- W930831715 hasConcept C40003534 @default.
- W930831715 hasConcept C46362747 @default.
- W930831715 hasConcept C49040817 @default.
- W930831715 hasConceptScore W930831715C107365816 @default.
- W930831715 hasConceptScore W930831715C111368507 @default.
- W930831715 hasConceptScore W930831715C120665830 @default.
- W930831715 hasConceptScore W930831715C121332964 @default.
- W930831715 hasConceptScore W930831715C127313418 @default.
- W930831715 hasConceptScore W930831715C159985019 @default.
- W930831715 hasConceptScore W930831715C160671074 @default.
- W930831715 hasConceptScore W930831715C192562407 @default.
- W930831715 hasConceptScore W930831715C2777289219 @default.
- W930831715 hasConceptScore W930831715C2777855556 @default.
- W930831715 hasConceptScore W930831715C2779133538 @default.
- W930831715 hasConceptScore W930831715C40003534 @default.
- W930831715 hasConceptScore W930831715C46362747 @default.
- W930831715 hasConceptScore W930831715C49040817 @default.
- W930831715 hasFunder F4320320912 @default.
- W930831715 hasLocation W9308317151 @default.
- W930831715 hasOpenAccess W930831715 @default.
- W930831715 hasPrimaryLocation W9308317151 @default.
- W930831715 hasRelatedWork W1921331855 @default.
- W930831715 hasRelatedWork W1973473696 @default.
- W930831715 hasRelatedWork W1976713221 @default.
- W930831715 hasRelatedWork W1998820451 @default.
- W930831715 hasRelatedWork W2033796979 @default.
- W930831715 hasRelatedWork W2113107899 @default.
- W930831715 hasRelatedWork W2153160607 @default.
- W930831715 hasRelatedWork W2630739289 @default.
- W930831715 hasRelatedWork W2970620863 @default.
- W930831715 hasRelatedWork W3152705935 @default.
- W930831715 hasVolume "42" @default.
- W930831715 isParatext "false" @default.
- W930831715 isRetracted "false" @default.
- W930831715 magId "930831715" @default.
- W930831715 workType "article" @default.