Matches in SemOpenAlex for { <https://semopenalex.org/work/W931567891> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W931567891 endingPage "159" @default.
- W931567891 startingPage "153" @default.
- W931567891 abstract "A thermally-driven polysilicon microactuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS(tetraethylorthosilicate) oxide as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And newly developed HF GPE(gas-phase etching) process was also employed to eliminate the troublesome stiction problem using anhydrous HF gas and CHOH vapor, and successfully fabricated the microactuators. The actuation is incurred by the thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon microactuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10V and 50Hz square wave. The actuating characteris- tics are also compared with the simulalted results considering heat transfer and thermal expansion in the polysilicon layer. This microactuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response." @default.
- W931567891 created "2016-06-24" @default.
- W931567891 creator A5025474192 @default.
- W931567891 creator A5061693426 @default.
- W931567891 creator A5088443645 @default.
- W931567891 date "1997-01-01" @default.
- W931567891 modified "2023-09-26" @default.
- W931567891 title "Fabrication of Thermally-Driven Polysilicon Microactuator and Its Characterization" @default.
- W931567891 hasPublicationYear "1997" @default.
- W931567891 type Work @default.
- W931567891 sameAs 931567891 @default.
- W931567891 citedByCount "0" @default.
- W931567891 crossrefType "journal-article" @default.
- W931567891 hasAuthorship W931567891A5025474192 @default.
- W931567891 hasAuthorship W931567891A5061693426 @default.
- W931567891 hasAuthorship W931567891A5088443645 @default.
- W931567891 hasConcept C119599485 @default.
- W931567891 hasConcept C127413603 @default.
- W931567891 hasConcept C136525101 @default.
- W931567891 hasConcept C142724271 @default.
- W931567891 hasConcept C145667562 @default.
- W931567891 hasConcept C159985019 @default.
- W931567891 hasConcept C165801399 @default.
- W931567891 hasConcept C172385210 @default.
- W931567891 hasConcept C172707124 @default.
- W931567891 hasConcept C192562407 @default.
- W931567891 hasConcept C204787440 @default.
- W931567891 hasConcept C2361726 @default.
- W931567891 hasConcept C24326235 @default.
- W931567891 hasConcept C25356406 @default.
- W931567891 hasConcept C2779227376 @default.
- W931567891 hasConcept C37292000 @default.
- W931567891 hasConcept C37977207 @default.
- W931567891 hasConcept C49040817 @default.
- W931567891 hasConcept C58373989 @default.
- W931567891 hasConcept C71924100 @default.
- W931567891 hasConceptScore W931567891C119599485 @default.
- W931567891 hasConceptScore W931567891C127413603 @default.
- W931567891 hasConceptScore W931567891C136525101 @default.
- W931567891 hasConceptScore W931567891C142724271 @default.
- W931567891 hasConceptScore W931567891C145667562 @default.
- W931567891 hasConceptScore W931567891C159985019 @default.
- W931567891 hasConceptScore W931567891C165801399 @default.
- W931567891 hasConceptScore W931567891C172385210 @default.
- W931567891 hasConceptScore W931567891C172707124 @default.
- W931567891 hasConceptScore W931567891C192562407 @default.
- W931567891 hasConceptScore W931567891C204787440 @default.
- W931567891 hasConceptScore W931567891C2361726 @default.
- W931567891 hasConceptScore W931567891C24326235 @default.
- W931567891 hasConceptScore W931567891C25356406 @default.
- W931567891 hasConceptScore W931567891C2779227376 @default.
- W931567891 hasConceptScore W931567891C37292000 @default.
- W931567891 hasConceptScore W931567891C37977207 @default.
- W931567891 hasConceptScore W931567891C49040817 @default.
- W931567891 hasConceptScore W931567891C58373989 @default.
- W931567891 hasConceptScore W931567891C71924100 @default.
- W931567891 hasIssue "12" @default.
- W931567891 hasLocation W9315678911 @default.
- W931567891 hasOpenAccess W931567891 @default.
- W931567891 hasPrimaryLocation W9315678911 @default.
- W931567891 hasRelatedWork W1979750953 @default.
- W931567891 hasRelatedWork W1997378434 @default.
- W931567891 hasRelatedWork W2027733658 @default.
- W931567891 hasRelatedWork W2033986891 @default.
- W931567891 hasRelatedWork W2035066109 @default.
- W931567891 hasRelatedWork W2035460019 @default.
- W931567891 hasRelatedWork W2045020767 @default.
- W931567891 hasRelatedWork W2050632310 @default.
- W931567891 hasRelatedWork W2085908435 @default.
- W931567891 hasRelatedWork W2097373652 @default.
- W931567891 hasRelatedWork W2126628723 @default.
- W931567891 hasRelatedWork W2139608513 @default.
- W931567891 hasRelatedWork W2141832440 @default.
- W931567891 hasRelatedWork W2157375988 @default.
- W931567891 hasRelatedWork W2160043444 @default.
- W931567891 hasRelatedWork W2547515112 @default.
- W931567891 hasRelatedWork W2547644813 @default.
- W931567891 hasRelatedWork W2575099721 @default.
- W931567891 hasRelatedWork W2587322121 @default.
- W931567891 hasRelatedWork W829894555 @default.
- W931567891 hasVolume "14" @default.
- W931567891 isParatext "false" @default.
- W931567891 isRetracted "false" @default.
- W931567891 magId "931567891" @default.
- W931567891 workType "article" @default.