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- W933453937 abstract "본 연구에서는 BPSG(borophosphosilicate glass)/SiO2/Si 기판상에 5000 $AA$ 의 구리박막을 화학증착한 후 Ar 분위기하 250-55 $0^{circ}C$ , 5-90초 급속열처리하여 열처리 전후의 결정구조, 면저항, 미세구조의 박막특성 변화를 분석하였다. 후열처리된 구리박막에서는 결정성 및 (111) 배향의개선과 함께 결정립 ..." @default.
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- W933453937 date "1996-01-01" @default.
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- W933453937 title "Effect of Post-annealing on the Properties of the Copper Films Grown on BPSG by Chemical Vapor Deposition" @default.
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