FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W937991636> ?p ?o ?g. }

• W937991636 endingPage "82" @default.
• W937991636 startingPage "77" @default.
• W937991636 abstract "BaTiO3 thin films were prepared on Nb–SrTiO3 (100) and Pt/Al2O3/SiO2/Si substrates by radio frequency (rf) magnetron sputtering using a stoichiometric BaTiO3 ceramic target. This on-axis BaTiO3 thin film growth encountered severe re-sputtering and substrate etching, above a threshold power density (4 W/cm2), due to negative ion formation at the target surface and subsequent acceleration towards the substrate. However, the film deposition with reduced or negligible re-sputtering was possible below 4 W/cm2 of rf-power. The rf-voltage vs. power curve showed two distinct linear regimes with high and low slopes; the change in the slope coincides with substrate etching. Optical emission spectroscopy was employed to establish the link between the onset of excessive re-sputtering and could be used as a control tool. Since, negative oxygen ions (O−) are responsible for the re-sputtering, additional processing parameters like the oxygen partial pressure [Po = (O2 ∕ O2 + Ar) %] and total pressure were also adjusted to realize target stoichiometry on the grown films. Finally, through optimization steps, as revealed by the X-ray photoelectron spectroscopy, stoichiometric BaTiO3 films were obtained, at a pressure ≥ 2.7 Pa, power density of 2 W/cm2 and Po around 50%." @default.
• W937991636 created "2016-06-24" @default.
• W937991636 creator A5001145766 @default.
• W937991636 creator A5028888983 @default.
• W937991636 creator A5039416437 @default.
• W937991636 creator A5050968400 @default.
• W937991636 creator A5052851824 @default.
• W937991636 creator A5062384659 @default.
• W937991636 creator A5079258907 @default.
• W937991636 creator A5080070634 @default.
• W937991636 date "2015-12-01" @default.
• W937991636 modified "2023-10-13" @default.
• W937991636 title "On-axis radio frequency magnetron sputtering of stoichiometric BaTiO3 target: Localized re-sputtering and substrate etching during thin film growth" @default.
• W937991636 cites W1969589430 @default.
• W937991636 cites W1977284103 @default.
• W937991636 cites W1978503914 @default.
• W937991636 cites W1989081944 @default.
• W937991636 cites W1994319933 @default.
• W937991636 cites W2003720536 @default.
• W937991636 cites W2007478237 @default.
• W937991636 cites W2007805765 @default.
• W937991636 cites W2008983388 @default.
• W937991636 cites W2011965307 @default.
• W937991636 cites W2018712706 @default.
• W937991636 cites W2033248441 @default.
• W937991636 cites W2083036624 @default.
• W937991636 cites W2083752359 @default.
• W937991636 cites W2091487320 @default.
• W937991636 cites W2091988165 @default.
• W937991636 cites W2121330560 @default.
• W937991636 cites W2148170032 @default.
• W937991636 cites W2166404877 @default.
• W937991636 cites W4233622066 @default.
• W937991636 doi "https://doi.org/10.1016/j.tsf.2015.07.065" @default.
• W937991636 hasPublicationYear "2015" @default.
• W937991636 type Work @default.
• W937991636 sameAs 937991636 @default.
• W937991636 citedByCount "7" @default.
• W937991636 countsByYear W9379916362015 @default.
• W937991636 countsByYear W9379916362017 @default.
• W937991636 countsByYear W9379916362018 @default.
• W937991636 countsByYear W9379916362019 @default.
• W937991636 countsByYear W9379916362021 @default.
• W937991636 countsByYear W9379916362022 @default.
• W937991636 countsByYear W9379916362023 @default.
• W937991636 crossrefType "journal-article" @default.
• W937991636 hasAuthorship W937991636A5001145766 @default.
• W937991636 hasAuthorship W937991636A5028888983 @default.
• W937991636 hasAuthorship W937991636A5039416437 @default.
• W937991636 hasAuthorship W937991636A5050968400 @default.
• W937991636 hasAuthorship W937991636A5052851824 @default.
• W937991636 hasAuthorship W937991636A5062384659 @default.
• W937991636 hasAuthorship W937991636A5079258907 @default.
• W937991636 hasAuthorship W937991636A5080070634 @default.
• W937991636 hasConcept C100460472 @default.
• W937991636 hasConcept C111368507 @default.
• W937991636 hasConcept C113196181 @default.
• W937991636 hasConcept C121332964 @default.
• W937991636 hasConcept C123408415 @default.
• W937991636 hasConcept C127313418 @default.
• W937991636 hasConcept C144082473 @default.
• W937991636 hasConcept C171250308 @default.
• W937991636 hasConcept C175708663 @default.
• W937991636 hasConcept C178790620 @default.
• W937991636 hasConcept C185592680 @default.
• W937991636 hasConcept C19067145 @default.
• W937991636 hasConcept C192562407 @default.
• W937991636 hasConcept C22423302 @default.
• W937991636 hasConcept C2777289219 @default.
• W937991636 hasConcept C2779227376 @default.
• W937991636 hasConcept C43617362 @default.
• W937991636 hasConcept C46141821 @default.
• W937991636 hasConcept C49040817 @default.
• W937991636 hasConcept C540031477 @default.
• W937991636 hasConcept C61427134 @default.
• W937991636 hasConcept C68463220 @default.
• W937991636 hasConceptScore W937991636C100460472 @default.
• W937991636 hasConceptScore W937991636C111368507 @default.
• W937991636 hasConceptScore W937991636C113196181 @default.
• W937991636 hasConceptScore W937991636C121332964 @default.
• W937991636 hasConceptScore W937991636C123408415 @default.
• W937991636 hasConceptScore W937991636C127313418 @default.
• W937991636 hasConceptScore W937991636C144082473 @default.
• W937991636 hasConceptScore W937991636C171250308 @default.
• W937991636 hasConceptScore W937991636C175708663 @default.
• W937991636 hasConceptScore W937991636C178790620 @default.
• W937991636 hasConceptScore W937991636C185592680 @default.
• W937991636 hasConceptScore W937991636C19067145 @default.
• W937991636 hasConceptScore W937991636C192562407 @default.
• W937991636 hasConceptScore W937991636C22423302 @default.
• W937991636 hasConceptScore W937991636C2777289219 @default.
• W937991636 hasConceptScore W937991636C2779227376 @default.
• W937991636 hasConceptScore W937991636C43617362 @default.
• W937991636 hasConceptScore W937991636C46141821 @default.
• W937991636 hasConceptScore W937991636C49040817 @default.
• W937991636 hasConceptScore W937991636C540031477 @default.
• W937991636 hasConceptScore W937991636C61427134 @default.
• W937991636 hasConceptScore W937991636C68463220 @default.

• next