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- W941693046 abstract "微电子机械系统(MEMS)技术结合磁性材料的特性,会产生许多新的功能,并在很多领域得到应用,如信息技术、汽车工业、生物医学,航空以及科学仪器等.本文阐述了在微米尺寸下,磁性MEMS相对于静电和压电执行器,在强度、偏振、执行距离等方面具有的优势,并就磁性MEMS现有及潜在的应用加以概述." @default.
- W941693046 created "2016-06-24" @default.
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- W941693046 creator A5073869928 @default.
- W941693046 date "2004-01-01" @default.
- W941693046 modified "2023-09-28" @default.
- W941693046 title "磁性微电子机械系统（MMEMS）的应用" @default.
- W941693046 hasPublicationYear "2004" @default.
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