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- W9435 abstract "Zr 1-x Al x N layers have been deposited in the full compositional range (x = 0…1) by adjust- ing working point and pulse times for reactive pulsed magnetron co-sputtering of aluminium and zirconium targets. Whereas ZrN is known to be a hard coating material with properties similar to the well established TiN, yet a higher oxidation resistance, no enhanced hardness is found for Zr 1- x Al x N in a range x=0.3…0.9, as it is the case for Ti 1-x Al x N with x = 0.5…0.7. However, films with a fraction of only a few atomic percent aluminium exhibit enhanced hardness up to 30 GPa, which is well above the hardness of pure ZrN or pure AlN (25 GPa both) deposited by reactive pulse magnetron sputtering. XRD investigations reveal the nanocrystalline nature of the coating with a grain size of 10 nm for the cubic structure ZrN with a (100) preferred orientation. It is believed that Al acts as an impurity which limits the grain growth and initiates frequent re-nucleation of ZrN-crystallites. Thereby, the nanocrystalline structure is formed with a maximum in hardness for an optimum Al concentration of approximately 5 at.%." @default.
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- W9435 date "2007-01-01" @default.
- W9435 modified "2023-09-27" @default.
- W9435 title "Zr-Al-N NANOCOMPOSITE COATINGS DEPOSITED BY PULSE MAGNETRON SPUTTERING" @default.
- W9435 hasPublicationYear "2007" @default.
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