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- W946137684 abstract "1 Introduction The authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface, which is re-ferred to as the angle grid, and a two-dimension-al (2D) slope sensor[2-3]." @default.
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- W946137684 date "2003-01-01" @default.
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- W946137684 title "Precision nanometrology of a large area microstructured metrology surface" @default.
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