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- W95221607 abstract "{open_quotes}Dust{close_quotes} contamination is a major concern in the plasma processing of microelectronics components. Particles (10s nm to many microns) negatively charge in glow discharges and are therefore subject to both electrical and fluid forces. These forces cause particles to accumulate in regions where the interparticle spacing may be less than the plasma shielding distance of the particles. The authors have developed a Pseudoparticle in Cell-Monte Carlo simulation for electron and ion transport in the vicinity of dust particles to investigate conditions where the sheaths of adjacent particles overlap. Results from the model will be discussed. They found that when two dust particles are aligned parallel to the electric field, the upstream particle (with respect to the electron drift) shadows the rear particle, resulting in a lower total charge on the rear particle. They also observe that the total charge on two dust particles decreases as the interparticle distance decreases and their mutual shielding increases." @default.
- W95221607 created "2016-06-24" @default.
- W95221607 creator A5009306289 @default.
- W95221607 creator A5015673713 @default.
- W95221607 date "1993-12-01" @default.
- W95221607 modified "2023-09-23" @default.
- W95221607 title "Plasma-dust interactions of mutually shielded particles in low pressure glow discharges" @default.
- W95221607 hasPublicationYear "1993" @default.
- W95221607 type Work @default.
- W95221607 sameAs 95221607 @default.
- W95221607 citedByCount "0" @default.
- W95221607 crossrefType "journal-article" @default.
- W95221607 hasAuthorship W95221607A5009306289 @default.
- W95221607 hasAuthorship W95221607A5015673713 @default.
- W95221607 hasConcept C111368507 @default.
- W95221607 hasConcept C113078167 @default.
- W95221607 hasConcept C119599485 @default.
- W95221607 hasConcept C121332964 @default.
- W95221607 hasConcept C127313418 @default.
- W95221607 hasConcept C127413603 @default.
- W95221607 hasConcept C145148216 @default.
- W95221607 hasConcept C147120987 @default.
- W95221607 hasConcept C159985019 @default.
- W95221607 hasConcept C184779094 @default.
- W95221607 hasConcept C185544564 @default.
- W95221607 hasConcept C192562407 @default.
- W95221607 hasConcept C2265751 @default.
- W95221607 hasConcept C2776595061 @default.
- W95221607 hasConcept C2778517922 @default.
- W95221607 hasConcept C35048267 @default.
- W95221607 hasConcept C41999313 @default.
- W95221607 hasConcept C4424474 @default.
- W95221607 hasConcept C60799052 @default.
- W95221607 hasConcept C62520636 @default.
- W95221607 hasConcept C77590175 @default.
- W95221607 hasConcept C82706917 @default.
- W95221607 hasConceptScore W95221607C111368507 @default.
- W95221607 hasConceptScore W95221607C113078167 @default.
- W95221607 hasConceptScore W95221607C119599485 @default.
- W95221607 hasConceptScore W95221607C121332964 @default.
- W95221607 hasConceptScore W95221607C127313418 @default.
- W95221607 hasConceptScore W95221607C127413603 @default.
- W95221607 hasConceptScore W95221607C145148216 @default.
- W95221607 hasConceptScore W95221607C147120987 @default.
- W95221607 hasConceptScore W95221607C159985019 @default.
- W95221607 hasConceptScore W95221607C184779094 @default.
- W95221607 hasConceptScore W95221607C185544564 @default.
- W95221607 hasConceptScore W95221607C192562407 @default.
- W95221607 hasConceptScore W95221607C2265751 @default.
- W95221607 hasConceptScore W95221607C2776595061 @default.
- W95221607 hasConceptScore W95221607C2778517922 @default.
- W95221607 hasConceptScore W95221607C35048267 @default.
- W95221607 hasConceptScore W95221607C41999313 @default.
- W95221607 hasConceptScore W95221607C4424474 @default.
- W95221607 hasConceptScore W95221607C60799052 @default.
- W95221607 hasConceptScore W95221607C62520636 @default.
- W95221607 hasConceptScore W95221607C77590175 @default.
- W95221607 hasConceptScore W95221607C82706917 @default.
- W95221607 hasIssue "13" @default.
- W95221607 hasLocation W952216071 @default.
- W95221607 hasOpenAccess W95221607 @default.
- W95221607 hasPrimaryLocation W952216071 @default.
- W95221607 hasRelatedWork W1508021166 @default.
- W95221607 hasRelatedWork W1626740552 @default.
- W95221607 hasRelatedWork W1980775276 @default.
- W95221607 hasRelatedWork W1988315664 @default.
- W95221607 hasRelatedWork W1996079467 @default.
- W95221607 hasRelatedWork W1996494558 @default.
- W95221607 hasRelatedWork W2015108115 @default.
- W95221607 hasRelatedWork W2056135093 @default.
- W95221607 hasRelatedWork W2082894183 @default.
- W95221607 hasRelatedWork W2086484792 @default.
- W95221607 hasRelatedWork W2101938381 @default.
- W95221607 hasRelatedWork W2140861707 @default.
- W95221607 hasRelatedWork W2144588334 @default.
- W95221607 hasRelatedWork W2153200056 @default.
- W95221607 hasRelatedWork W2569603113 @default.
- W95221607 hasRelatedWork W2605506462 @default.
- W95221607 hasRelatedWork W2760574661 @default.
- W95221607 hasRelatedWork W2787220960 @default.
- W95221607 hasRelatedWork W2996589637 @default.
- W95221607 hasRelatedWork W3047212244 @default.
- W95221607 hasVolume "38" @default.
- W95221607 isParatext "false" @default.
- W95221607 isRetracted "false" @default.
- W95221607 magId "95221607" @default.
- W95221607 workType "article" @default.