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- W95654499 abstract "A method is described for determination of the degree of nonuniformity of resistivity over the thickness of a high-resistance layer that is based on measurement of the frequency dependence of specimen impedance. A computer-based method is proposed for calculation of the resistivity distribution. A circuit is given for measurement of capacitance and loss tangent in the frequency range of 20-10/sup 7/ Hz, from which specimen impedance is measured with an error of approx. 15% for R and 5% for X. A graph is given for the resistivity distribution in an i-type layer formed by proton irradiation of n-type GaAs." @default.
- W95654499 created "2016-06-24" @default.
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- W95654499 date "1987-04-01" @default.
- W95654499 modified "2023-09-24" @default.
- W95654499 title "Determination of degree of nonuniformity of resistivity over thickness of high-resistance layers" @default.
- W95654499 hasPublicationYear "1987" @default.
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