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- W95799298 abstract "To achieve the image performance necessary for soft x-ray projection lithography, interferometric testing at the design wavelength is required to accurately characterize the wavefront of the imaging system. The wavefront depends not only on the surface figure of the individual optics and on their relative alignment, but also on aperture dependent phase shifts induced by the resonant multilayer coatings on the optical surfaces. This paper describes the design and lithographic fabrication of an array of point diffraction interferometers on a Si 3 N 4 membrane that has been over-coated with a spatially graded absorbing film to provide fringe contrast control. Experimental results using a visible light analogue (larger pinholes and different absorption gradient) will be presented." @default.
- W95799298 created "2016-06-24" @default.
- W95799298 creator A5037444380 @default.
- W95799298 creator A5048454295 @default.
- W95799298 date "1993-01-01" @default.
- W95799298 modified "2023-10-14" @default.
- W95799298 title "Point Diffraction Interferometry at Soft X-ray Wavelengths" @default.
- W95799298 doi "https://doi.org/10.1364/sxray.1993.tuc.1" @default.
- W95799298 hasPublicationYear "1993" @default.
- W95799298 type Work @default.
- W95799298 sameAs 95799298 @default.
- W95799298 citedByCount "0" @default.
- W95799298 crossrefType "proceedings-article" @default.
- W95799298 hasAuthorship W95799298A5037444380 @default.
- W95799298 hasAuthorship W95799298A5048454295 @default.
- W95799298 hasBestOaLocation W957992982 @default.
- W95799298 hasConcept C11413529 @default.
- W95799298 hasConcept C120665830 @default.
- W95799298 hasConcept C121332964 @default.
- W95799298 hasConcept C132771110 @default.
- W95799298 hasConcept C136525101 @default.
- W95799298 hasConcept C142724271 @default.
- W95799298 hasConcept C159985019 @default.
- W95799298 hasConcept C165699331 @default.
- W95799298 hasConcept C166689943 @default.
- W95799298 hasConcept C192562407 @default.
- W95799298 hasConcept C204223013 @default.
- W95799298 hasConcept C204787440 @default.
- W95799298 hasConcept C207114421 @default.
- W95799298 hasConcept C23576306 @default.
- W95799298 hasConcept C24890656 @default.
- W95799298 hasConcept C2779227376 @default.
- W95799298 hasConcept C41008148 @default.
- W95799298 hasConcept C41794268 @default.
- W95799298 hasConcept C49040817 @default.
- W95799298 hasConcept C53524968 @default.
- W95799298 hasConcept C57493831 @default.
- W95799298 hasConcept C6260449 @default.
- W95799298 hasConcept C71924100 @default.
- W95799298 hasConcept C78336883 @default.
- W95799298 hasConceptScore W95799298C11413529 @default.
- W95799298 hasConceptScore W95799298C120665830 @default.
- W95799298 hasConceptScore W95799298C121332964 @default.
- W95799298 hasConceptScore W95799298C132771110 @default.
- W95799298 hasConceptScore W95799298C136525101 @default.
- W95799298 hasConceptScore W95799298C142724271 @default.
- W95799298 hasConceptScore W95799298C159985019 @default.
- W95799298 hasConceptScore W95799298C165699331 @default.
- W95799298 hasConceptScore W95799298C166689943 @default.
- W95799298 hasConceptScore W95799298C192562407 @default.
- W95799298 hasConceptScore W95799298C204223013 @default.
- W95799298 hasConceptScore W95799298C204787440 @default.
- W95799298 hasConceptScore W95799298C207114421 @default.
- W95799298 hasConceptScore W95799298C23576306 @default.
- W95799298 hasConceptScore W95799298C24890656 @default.
- W95799298 hasConceptScore W95799298C2779227376 @default.
- W95799298 hasConceptScore W95799298C41008148 @default.
- W95799298 hasConceptScore W95799298C41794268 @default.
- W95799298 hasConceptScore W95799298C49040817 @default.
- W95799298 hasConceptScore W95799298C53524968 @default.
- W95799298 hasConceptScore W95799298C57493831 @default.
- W95799298 hasConceptScore W95799298C6260449 @default.
- W95799298 hasConceptScore W95799298C71924100 @default.
- W95799298 hasConceptScore W95799298C78336883 @default.
- W95799298 hasLocation W957992981 @default.
- W95799298 hasLocation W957992982 @default.
- W95799298 hasLocation W957992983 @default.
- W95799298 hasOpenAccess W95799298 @default.
- W95799298 hasPrimaryLocation W957992981 @default.
- W95799298 hasRelatedWork W2009147584 @default.
- W95799298 hasRelatedWork W2043197055 @default.
- W95799298 hasRelatedWork W2077045204 @default.
- W95799298 hasRelatedWork W2090337986 @default.
- W95799298 hasRelatedWork W2138624925 @default.
- W95799298 hasRelatedWork W2154536669 @default.
- W95799298 hasRelatedWork W2989438023 @default.
- W95799298 hasRelatedWork W4321516692 @default.
- W95799298 hasRelatedWork W4321641452 @default.
- W95799298 hasRelatedWork W95799298 @default.
- W95799298 isParatext "false" @default.
- W95799298 isRetracted "false" @default.
- W95799298 magId "95799298" @default.
- W95799298 workType "article" @default.