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- W959394054 abstract "The retention time characteristics in DRAM cells are strongly influenced by various leakage mechanisms near the storage node junction. In this work, we present a full three-dimensional analysis of stress distributions in and around the active area of high-density memory cells. We use a combination of high-resolution metrology analysis and 3D numerical modeling to provide quantitative estimates. Since shallow - trench isolation (STI) process used in high-density cells is one of the major contributors to stress, we study the effects of various materials used to fill the trench. Our electron diffraction contrast (EDC) methodology provides a spatial resolution on the order of 10 nm with sensitivity on of the order of tens of MPa and therefore useful for the analysis of scaled high density memory cells." @default.
- W959394054 created "2016-06-24" @default.
- W959394054 creator A5040734837 @default.
- W959394054 creator A5048694862 @default.
- W959394054 creator A5049304673 @default.
- W959394054 creator A5052883326 @default.
- W959394054 creator A5073596472 @default.
- W959394054 date "2004-01-01" @default.
- W959394054 modified "2023-09-23" @default.
- W959394054 title "Three-Dimensional Characterization and Modeling of Stress Distribution in High-Density DRAM Memory Cells" @default.
- W959394054 cites W2108313145 @default.
- W959394054 cites W2128822637 @default.
- W959394054 doi "https://doi.org/10.1007/978-3-7091-0624-2_17" @default.
- W959394054 hasPublicationYear "2004" @default.
- W959394054 type Work @default.
- W959394054 sameAs 959394054 @default.
- W959394054 citedByCount "1" @default.
- W959394054 crossrefType "book-chapter" @default.
- W959394054 hasAuthorship W959394054A5040734837 @default.
- W959394054 hasAuthorship W959394054A5048694862 @default.
- W959394054 hasAuthorship W959394054A5049304673 @default.
- W959394054 hasAuthorship W959394054A5052883326 @default.
- W959394054 hasAuthorship W959394054A5073596472 @default.
- W959394054 hasBestOaLocation W9593940542 @default.
- W959394054 hasConcept C105066941 @default.
- W959394054 hasConcept C118702147 @default.
- W959394054 hasConcept C119599485 @default.
- W959394054 hasConcept C127413603 @default.
- W959394054 hasConcept C138885662 @default.
- W959394054 hasConcept C139719470 @default.
- W959394054 hasConcept C155310634 @default.
- W959394054 hasConcept C162324750 @default.
- W959394054 hasConcept C171250308 @default.
- W959394054 hasConcept C192562407 @default.
- W959394054 hasConcept C21036866 @default.
- W959394054 hasConcept C2777042071 @default.
- W959394054 hasConcept C2779227376 @default.
- W959394054 hasConcept C2780841128 @default.
- W959394054 hasConcept C2780866740 @default.
- W959394054 hasConcept C41895202 @default.
- W959394054 hasConcept C49040817 @default.
- W959394054 hasConcept C62611344 @default.
- W959394054 hasConcept C66938386 @default.
- W959394054 hasConcept C7366592 @default.
- W959394054 hasConcept C98986596 @default.
- W959394054 hasConceptScore W959394054C105066941 @default.
- W959394054 hasConceptScore W959394054C118702147 @default.
- W959394054 hasConceptScore W959394054C119599485 @default.
- W959394054 hasConceptScore W959394054C127413603 @default.
- W959394054 hasConceptScore W959394054C138885662 @default.
- W959394054 hasConceptScore W959394054C139719470 @default.
- W959394054 hasConceptScore W959394054C155310634 @default.
- W959394054 hasConceptScore W959394054C162324750 @default.
- W959394054 hasConceptScore W959394054C171250308 @default.
- W959394054 hasConceptScore W959394054C192562407 @default.
- W959394054 hasConceptScore W959394054C21036866 @default.
- W959394054 hasConceptScore W959394054C2777042071 @default.
- W959394054 hasConceptScore W959394054C2779227376 @default.
- W959394054 hasConceptScore W959394054C2780841128 @default.
- W959394054 hasConceptScore W959394054C2780866740 @default.
- W959394054 hasConceptScore W959394054C41895202 @default.
- W959394054 hasConceptScore W959394054C49040817 @default.
- W959394054 hasConceptScore W959394054C62611344 @default.
- W959394054 hasConceptScore W959394054C66938386 @default.
- W959394054 hasConceptScore W959394054C7366592 @default.
- W959394054 hasConceptScore W959394054C98986596 @default.
- W959394054 hasLocation W9593940541 @default.
- W959394054 hasLocation W9593940542 @default.
- W959394054 hasOpenAccess W959394054 @default.
- W959394054 hasPrimaryLocation W9593940541 @default.
- W959394054 hasRelatedWork W2074633534 @default.
- W959394054 hasRelatedWork W2158706874 @default.
- W959394054 hasRelatedWork W2316005908 @default.
- W959394054 hasRelatedWork W2327331308 @default.
- W959394054 hasRelatedWork W2737492285 @default.
- W959394054 hasRelatedWork W2748952813 @default.
- W959394054 hasRelatedWork W2795854470 @default.
- W959394054 hasRelatedWork W2899084033 @default.
- W959394054 hasRelatedWork W2950627840 @default.
- W959394054 hasRelatedWork W4243387708 @default.
- W959394054 isParatext "false" @default.
- W959394054 isRetracted "false" @default.
- W959394054 magId "959394054" @default.
- W959394054 workType "book-chapter" @default.