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• W959672008 abstract "This chapter discusses the supersonic nano-particle beam technique for removing nano-sized containment particles from surfaces. Particulate contamination seriously affects the manufacturing yield of micrometer- and sub-micrometer-scale devices. Various nanotechnology-based devices with feature dimensions in the nanometer size range will also be marketed in time, which may accelerate the size level for contamination control to decrease. Although the theoretical adhesion force for the contaminant particles in the nanometer range is linearly proportional to the particle size, the fluid-dynamic drag force is proportional to the second power of particle size, so the use of drag force for cleaning becomes less efficient as the contaminant size is decreased. The new aerosol cleaning technique based on nano-sized particles/droplets, instead of micrometer-sized particles/droplets used in the conventional aerosol cleaning techniques, can overcome the 50 nm particle size barriers and remove contaminant particles of ceramics, polymers, and metallic copper down to 20 nm with nearly 100% efficiency. Key to the successful cleaning of nanosized contaminant particles is the combination of smaller bullet size and a higher velocity. Bullet particles satisfying these requirements can be generated in two different ways e supersonic expansion and electrospray. In the supersonic expansion technique, solid bullet particles are generated by homogeneous nucleation and growth, where particle size and velocity are controlled by the gas composition, nozzle contour, and stagnation conditions pressure and temperature." @default.
• W959672008 created "2016-06-24" @default.
• W959672008 creator A5074098980 @default.
• W959672008 date "2011-01-01" @default.
• W959672008 modified "2023-09-24" @default.
• W959672008 title "Supersonic Nano-Particle Beam Technique for Removing Nano-Sized Contaminant Particles from Surfaces" @default.
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• W959672008 doi "https://doi.org/10.1016/b978-1-4377-7885-4.10001-6" @default.
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