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- W9605510 abstract "We have applied SiHzC12 addition together with HZ dilution to a-Si:H films and solar cells fabricated by mercury-sensitized photo-CVD. It was observed by SIMS measurements that CI was incorporated into a-Si:H films over IOi8 atom/cm3, even at the flow rate ratio of O.Ol(SiH2CI2 to SiH4). Furthermore, it was found that excess CI incorporated in a-Si:H films had been removed by HP dilution. With HZ dilution, we could control the excess acceptor states of a-Si:H films grown by SiH2C12 addition and when we applied them to the i-layer of a-Si solar cells, quantum efficiencies increased at all wavelength region and especially at middle wavelength region which is sensible to the electric field weakening of the i-layer by light induced degradation. As a result, we have achieved a high stabilized efficiency of 9.0% for an lcm2 single-junction a-Si:H solar cell." @default.
- W9605510 created "2016-06-24" @default.
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- W9605510 date "1997-01-01" @default.
- W9605510 modified "2023-09-27" @default.
- W9605510 title "FABRICATION OF HIGH STABILIZED EFFICIENCY a-Si SOLAR CELLS BY USING SiH2CI2 ADDITION" @default.
- W9605510 hasPublicationYear "1997" @default.
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