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- W96643118 abstract "The aim of this study is to investigate the potentiality of an HiPIMS reactive process with two gases, evaluating the process control and the properties of the deposited coatings compared to DCMagnetron Sputtering. TiCN(H) nano-composite films have been deposited in a CFUBMS apparatus and HiPIMS generator.Coatings have been characterized from compositional, microstructural as well as mechanical and tribological point of view" @default.
- W96643118 created "2016-06-24" @default.
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- W96643118 date "2014-04-01" @default.
- W96643118 modified "2023-09-27" @default.
- W96643118 title "Synthesis and characterization of titanium carbon nitride films by High Power Impulse Magnetron Sputtering" @default.
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