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- W97015963 abstract "The temperature lowering of the silicon growth process is essential in the aim of developing high-qaulity devices indispensable to further reduce the size and enhance the speed of new computers. For this, it is necessary to clarify the growth mechanism of silicon crystals at the atomic and molecular levels. Ab initio molecular orbital calculations have been carried out on the SX-2 supercomputer to elucidate the silicon vapor phase growth mechanism." @default.
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- W97015963 date "1991-01-01" @default.
- W97015963 modified "2023-09-27" @default.
- W97015963 title "THEORETICAL STUDIES OF SILICON CRYSTAL GROWTH MECHANISM BY AB INITIO MOLECULAR ORBITAL CALCULATIONS" @default.
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- W97015963 doi "https://doi.org/10.1016/b978-0-444-88864-8.50145-x" @default.
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