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- W97193081 abstract "Removed from the deposition region, an upstream hydrogen microwave plasma generates arsenic hydrides by etching the surface of solid arsenic. The hydrides are transported to the deposition region and mixed with trimethylgallium to achieve low temperature (350--400 [degree]C) and low pressure (750 mTorr) homoepitaxial GaAs films. Low precursor V/III ratios are used to achieve homoepitaxial films with high levels of carbon dopants (10[sup 19] to mid 10[sup 20] cm[sup [minus]3]). No active or afterglow plasma exists in the growth region. The observed homoepitaxial growth activation energies of 54 kcal/mole and 66 kcal/mole for films deposited with V/III ratios of 1/1 and 1/4, respectively, are in the range of those reported for the heterogeneous decomposition of trimethylgallium in the absence of arsine. The majority carriers are holes and have hole concentrations which correlate to the carbon doping, as determined by room temperature Hall effect measurements and secondary ion mass spectroscopy. Carrier mobility versus carbon concentration is also presented." @default.
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- W97193081 date "1992-12-01" @default.
- W97193081 modified "2023-09-27" @default.
- W97193081 title "Gallium arsenide homoepitaxy employing [ital in]-[ital situ] generated arsine radicals" @default.
- W97193081 hasPublicationYear "1992" @default.
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