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W98471311 abstract "Abstract A Cobalt-Neodymium Liquid Alloy Ion Source (LAIS) is investigated with respect to its cluster emission behaviour. Clusters and molecular ions were found. The influence of the source emission current on the cluster emission intensity and also on the cluster mass distribution is studied. The CoNd LAIS was used for writing patterning (implantation, sputtering) in a mass-selecting Focused Cluster Beam (FCB) system. Theoretical estimations were carried out concerning the use of the FCB for direct deposition at landing energies of about 100 eV / atom. First experimental results of cobalt FCBs are presented." @default.
W98471311 created "2016-06-24" @default.
W98471311 creator A5023666453 @default.
W98471311 creator A5024506646 @default.
W98471311 creator A5076633610 @default.
W98471311 creator A5087934545 @default.
W98471311 creator A5088266101 @default.
W98471311 date "1996-01-01" @default.
W98471311 modified "2023-09-25" @default.
W98471311 title "Cluster beams from a CoNd liquid alloy ion source" @default.
W98471311 cites W1972238877 @default.
W98471311 cites W1990544967 @default.
W98471311 cites W2004244616 @default.
W98471311 cites W3046333974 @default.
W98471311 cites W589668427 @default.
W98471311 doi "https://doi.org/10.1016/0167-9317(95)00237-5" @default.
W98471311 hasPublicationYear "1996" @default.
W98471311 type Work @default.
W98471311 sameAs 98471311 @default.
W98471311 citedByCount "3" @default.
W98471311 countsByYear W984713112016 @default.
W98471311 crossrefType "journal-article" @default.
W98471311 hasAuthorship W98471311A5023666453 @default.
W98471311 hasAuthorship W98471311A5024506646 @default.
W98471311 hasAuthorship W98471311A5076633610 @default.
W98471311 hasAuthorship W98471311A5087934545 @default.
W98471311 hasAuthorship W98471311A5088266101 @default.
W98471311 hasConcept C113196181 @default.
W98471311 hasConcept C121332964 @default.
W98471311 hasConcept C145148216 @default.
W98471311 hasConcept C149635348 @default.
W98471311 hasConcept C151730666 @default.
W98471311 hasConcept C164866538 @default.
W98471311 hasConcept C16876290 @default.
W98471311 hasConcept C171250308 @default.
W98471311 hasConcept C178790620 @default.
W98471311 hasConcept C184779094 @default.
W98471311 hasConcept C185592680 @default.
W98471311 hasConcept C188224857 @default.
W98471311 hasConcept C19067145 @default.
W98471311 hasConcept C191897082 @default.
W98471311 hasConcept C192562407 @default.
W98471311 hasConcept C199360897 @default.
W98471311 hasConcept C22423302 @default.
W98471311 hasConcept C2780026712 @default.
W98471311 hasConcept C2816523 @default.
W98471311 hasConcept C41008148 @default.
W98471311 hasConcept C43617362 @default.
W98471311 hasConcept C515602321 @default.
W98471311 hasConcept C58312451 @default.
W98471311 hasConcept C64297162 @default.
W98471311 hasConcept C86803240 @default.
W98471311 hasConceptScore W98471311C113196181 @default.
W98471311 hasConceptScore W98471311C121332964 @default.
W98471311 hasConceptScore W98471311C145148216 @default.
W98471311 hasConceptScore W98471311C149635348 @default.
W98471311 hasConceptScore W98471311C151730666 @default.
W98471311 hasConceptScore W98471311C164866538 @default.
W98471311 hasConceptScore W98471311C16876290 @default.
W98471311 hasConceptScore W98471311C171250308 @default.
W98471311 hasConceptScore W98471311C178790620 @default.
W98471311 hasConceptScore W98471311C184779094 @default.
W98471311 hasConceptScore W98471311C185592680 @default.
W98471311 hasConceptScore W98471311C188224857 @default.
W98471311 hasConceptScore W98471311C19067145 @default.
W98471311 hasConceptScore W98471311C191897082 @default.
W98471311 hasConceptScore W98471311C192562407 @default.
W98471311 hasConceptScore W98471311C199360897 @default.
W98471311 hasConceptScore W98471311C22423302 @default.
W98471311 hasConceptScore W98471311C2780026712 @default.
W98471311 hasConceptScore W98471311C2816523 @default.
W98471311 hasConceptScore W98471311C41008148 @default.
W98471311 hasConceptScore W98471311C43617362 @default.
W98471311 hasConceptScore W98471311C515602321 @default.
W98471311 hasConceptScore W98471311C58312451 @default.
W98471311 hasConceptScore W98471311C64297162 @default.
W98471311 hasConceptScore W98471311C86803240 @default.
W98471311 hasLocation W984713111 @default.
W98471311 hasOpenAccess W98471311 @default.
W98471311 hasPrimaryLocation W984713111 @default.
W98471311 hasRelatedWork W1532941824 @default.
W98471311 hasRelatedWork W1964604982 @default.
W98471311 hasRelatedWork W1965084872 @default.
W98471311 hasRelatedWork W1981044907 @default.
W98471311 hasRelatedWork W1984662102 @default.
W98471311 hasRelatedWork W1991662804 @default.
W98471311 hasRelatedWork W2012372659 @default.
W98471311 hasRelatedWork W2018499389 @default.
W98471311 hasRelatedWork W2020092194 @default.
W98471311 hasRelatedWork W2028455261 @default.
W98471311 hasRelatedWork W2042558538 @default.
W98471311 hasRelatedWork W2085842587 @default.
W98471311 hasRelatedWork W2090258135 @default.
W98471311 hasRelatedWork W2090768618 @default.
W98471311 hasRelatedWork W2095380453 @default.
W98471311 hasRelatedWork W2169433382 @default.
W98471311 hasRelatedWork W2332945821 @default.
W98471311 hasRelatedWork W240600738 @default.
W98471311 hasRelatedWork W2739513376 @default.
W98471311 isParatext "false" @default.