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- W984930392 abstract "A survey will be given on recent advances in the investigation of semi- conductor epilayers, heterostructures and superlattices using reciprocal space mapping techniques based on triple-axis diffractometry. It is shown that X-ray reciprocal space mapping yields quantitative information on strain, strain relaxation, as well as composition in such structures. These data are obtained from analyses of the isointensity contours of scattered X-ray inten- sity around reciprocal lattice points. Further analysis of the diffuse scattering yields also information on defect distribution in the epilayers." @default.
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- W984930392 date "1996-02-01" @default.
- W984930392 modified "2023-10-16" @default.
- W984930392 title "High Resolution X-ray Reciprocal Space Mapping" @default.
- W984930392 doi "https://doi.org/10.12693/aphyspola.89.115" @default.
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