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- W998538004 endingPage "1293" @default.
- W998538004 startingPage "1293" @default.
- W998538004 abstract "采用甚高频等离子体增强化学气相沉积(VHF-PECVD)技术制备了不同腔室环境下的微晶硅薄膜.对单室沉积掺杂层p材料后遗留在腔室中的硼对本征微晶i材料电学特性和结构特性的影响进行了详细研究.测试结果表明：单室沉积p层后的硼降低了微晶i层材料的暗电导，增加了材料的光敏性；由于硼对i层污染程度的不同，使得材料的激活能发生了变化；腔室中残余的硼也导致微晶硅薄膜的结晶状况恶化，同时弱化了材料的(220)择优取向.而在较高功率和较强氢稀释下制备的晶化率较高，(220)晶向明显择优的材料受硼污染影响相对减小." @default.
- W998538004 created "2016-06-24" @default.
- W998538004 creator A5008866587 @default.
- W998538004 creator A5013949574 @default.
- W998538004 creator A5022094500 @default.
- W998538004 creator A5023848989 @default.
- W998538004 creator A5024094412 @default.
- W998538004 creator A5026842915 @default.
- W998538004 creator A5068187584 @default.
- W998538004 creator A5071855419 @default.
- W998538004 creator A5083059745 @default.
- W998538004 creator A5085266394 @default.
- W998538004 date "2009-01-01" @default.
- W998538004 modified "2023-10-18" @default.
- W998538004 title "Influence of boron on the properties of intrinsic microcrystalline silicon thin films" @default.
- W998538004 doi "https://doi.org/10.7498/aps.58.1293" @default.
- W998538004 hasPublicationYear "2009" @default.
- W998538004 type Work @default.
- W998538004 sameAs 998538004 @default.
- W998538004 citedByCount "1" @default.
- W998538004 crossrefType "journal-article" @default.
- W998538004 hasAuthorship W998538004A5008866587 @default.
- W998538004 hasAuthorship W998538004A5013949574 @default.
- W998538004 hasAuthorship W998538004A5022094500 @default.
- W998538004 hasAuthorship W998538004A5023848989 @default.
- W998538004 hasAuthorship W998538004A5024094412 @default.
- W998538004 hasAuthorship W998538004A5026842915 @default.
- W998538004 hasAuthorship W998538004A5068187584 @default.
- W998538004 hasAuthorship W998538004A5071855419 @default.
- W998538004 hasAuthorship W998538004A5083059745 @default.
- W998538004 hasAuthorship W998538004A5085266394 @default.
- W998538004 hasBestOaLocation W9985380041 @default.
- W998538004 hasConcept C121332964 @default.
- W998538004 hasConcept C127413603 @default.
- W998538004 hasConcept C159467904 @default.
- W998538004 hasConcept C171250308 @default.
- W998538004 hasConcept C185544564 @default.
- W998538004 hasConcept C185592680 @default.
- W998538004 hasConcept C19067145 @default.
- W998538004 hasConcept C192562407 @default.
- W998538004 hasConcept C201370411 @default.
- W998538004 hasConcept C2776390347 @default.
- W998538004 hasConcept C2779667780 @default.
- W998538004 hasConcept C2993184922 @default.
- W998538004 hasConcept C42360764 @default.
- W998538004 hasConcept C49040817 @default.
- W998538004 hasConcept C501308230 @default.
- W998538004 hasConcept C544956773 @default.
- W998538004 hasConcept C61696701 @default.
- W998538004 hasConcept C8010536 @default.
- W998538004 hasConceptScore W998538004C121332964 @default.
- W998538004 hasConceptScore W998538004C127413603 @default.
- W998538004 hasConceptScore W998538004C159467904 @default.
- W998538004 hasConceptScore W998538004C171250308 @default.
- W998538004 hasConceptScore W998538004C185544564 @default.
- W998538004 hasConceptScore W998538004C185592680 @default.
- W998538004 hasConceptScore W998538004C19067145 @default.
- W998538004 hasConceptScore W998538004C192562407 @default.
- W998538004 hasConceptScore W998538004C201370411 @default.
- W998538004 hasConceptScore W998538004C2776390347 @default.
- W998538004 hasConceptScore W998538004C2779667780 @default.
- W998538004 hasConceptScore W998538004C2993184922 @default.
- W998538004 hasConceptScore W998538004C42360764 @default.
- W998538004 hasConceptScore W998538004C49040817 @default.
- W998538004 hasConceptScore W998538004C501308230 @default.
- W998538004 hasConceptScore W998538004C544956773 @default.
- W998538004 hasConceptScore W998538004C61696701 @default.
- W998538004 hasConceptScore W998538004C8010536 @default.
- W998538004 hasIssue "2" @default.
- W998538004 hasLocation W9985380041 @default.
- W998538004 hasOpenAccess W998538004 @default.
- W998538004 hasPrimaryLocation W9985380041 @default.
- W998538004 hasRelatedWork W1963733469 @default.
- W998538004 hasRelatedWork W1967118526 @default.
- W998538004 hasRelatedWork W1973913408 @default.
- W998538004 hasRelatedWork W1988906640 @default.
- W998538004 hasRelatedWork W2048089923 @default.
- W998538004 hasRelatedWork W2049813030 @default.
- W998538004 hasRelatedWork W2083454987 @default.
- W998538004 hasRelatedWork W2200246960 @default.
- W998538004 hasRelatedWork W2319524450 @default.
- W998538004 hasRelatedWork W2384933109 @default.
- W998538004 hasVolume "58" @default.
- W998538004 isParatext "false" @default.
- W998538004 isRetracted "false" @default.
- W998538004 magId "998538004" @default.
- W998538004 workType "article" @default.