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- W999922386 abstract "We report on the realization and characterization of a novel infrared imaging system. The prototype setup serves as a technological platform for a low-cost uncooled infrared camera. The core component of the infrared imager is a novel-type surface micro-machined sensor consisting of a micro-mirror focal plane array. A micro-mirror represents one pixel and exhibits a linear deflection upon long wave infrared irradiation (7-14 μm). The thermo-mechanical deflection is captured by an optical configuration and real-time, full-frame thermal imagery is generated. The sensor does not require any power for operation and can be micro-fabricated with as little as three lithographic steps using standard CMOS technology." @default.
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- W999922386 date "2013-01-01" @default.
- W999922386 modified "2023-10-03" @default.
- W999922386 title "4.4 - Low-cost uncooled infrared detector using thermomechanical micro-mirror array with optical readout" @default.
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- W999922386 doi "https://doi.org/10.5162/irs2013/i4.4" @default.
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